A radiation source includes a fuel supply, a collector, a debris mitigation system, and a temperature control system. The fuel supply device supplies fuel. The excitation device excites the fuel into a plasma. The collector collects radiation emitted by the plasma and directs the radiation to a beam exit. The debris mitigation system collects debris generated by the plasma and has a first component having a first conduit passing therethrough and a second component having a second conduit passing therethrough. The temperature control system increases or decreases temperatures of the first component and the second component by selectively heating or cooling a thermal transfer fluid circulating through the respective conduit. The temperature control system cools the first component to a first temperature that is below the melting point of the fuel and heats the second component to a second temperature that is above the melting point of the fuel.
Patent
BriefPatent brief
Problem
How can heat, airflow, and thermal load be managed more effectively in compact systems?
Novelty
The fuel supply device supplies fuel.
Uses
Patent review
Assignee
ASML Netherlands B.V.
Published
Mar 10, 2026
Inventors
Hrishikesh Patel, Yue Ma, G ne Nakibo lu, Albert Pieter Rijpma, Antonius Johannus Van Der Net, Rens Henricus Verhees, Zongquan Yang
Domain
Thermal systems
Problem
How can heat, airflow, and thermal load be managed more effectively in compact systems?
Solution
radiation source includes a fuel supply, a collector, a debris mitigation system, and a temperature control system.
Key novelty
The fuel supply device supplies fuel.
Applications
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