Protective liner for plasma source

A plasma source is provided including: a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube; a coil antenna disposed around the dielectric tube; and a dielectric liner positioned inside the dielectric tube. The dielectric liner includes one or more outer surfaces. The dielectric liner is disposed around an interior plasma-generating volume of the plasma source. The dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner, and the dielectric liner covers the one or more interior surfaces of the dielectric tube.